Chen Liu is a Senior Scientist in the MEMS Department at the A*STAR Institute of Microelectronics (A*STAR IME). He received his bachelor’s degree from the School of Physics, Peking University, China in 2014 and his PhD degree from Peking University’s School of Integrated Circuits in 2019. He subsequently joined A*STAR IME, where his research focuses on ScAlN-based ferroelectric and piezoelectric thin films and devices. His work spans material and process development, device physics, reliability and wafer-scale integration, with applications in ferroelectric memory, MEMS devices, and radio-frequency acoustic resonators and filters for 5G and millimetre-wave communications.
. He received his bachelor’s degree from the School of Physics, Peking University, China in 2014 and his PhD degree from Peking University’s School of Integrated Circuits in 2019. He subsequently joined A*STAR IME, where his research focuses […]&picture=https://research.a-star.edu.sg/wp-content/uploads/2026/09/chen-liu-e1789613904989.png)
