Inductively coupled plasma
2 results for "Inductively coupled plasma"
A better angle on microscopic devices
15 Mar 2018A flexible,
low-cost technique could lead to the mass production of microelectromechanical
systems for use in a range of applications
Cool method for making waveguides
19 Apr 2016Silicon-based films that are useful for waveguides have been made at temperatures low enough to be compatible with standard manufacturing processes
