MEMS

A flexible,
low-cost technique could lead to the mass production of microelectromechanical
systems for use in a range of applications

Thin films of a lead-free piezoelectric finally match the
performance of the lead-bearing standard

Researchers at the A*STAR Institute of Microelectronics are developing MEMS sensors and platforms to help build a hyper-attentive world of objects

Using a newly developed technique, protective casings for microscale devices can be built quickly and cheaply without damaging components

The A*STAR Institute of Microelectronics and nanoX Imaging Ltd join forces to develop a new medical X-ray imaging detector

An electromechanical switch using a single magnetic plate delivers superior performance in a tiny package

Researchers have developed a tunable, low-cost laser device that could help advance fiber-optic communications

Photonics and microelectromechanical systems fabricated separately on different wafers can now be aligned precisely by finishing with a single processing step

Micro-electromechanical systems accurately align optical components on a silicon microchip